The Accurion (Nanofilm ep3sw) Imaging Ellipsometer characterizes dielectric properties of thin films. Using an intense solid state laser (658 nm), light is reflected off a sample and the change in the polarization of the light is detected.
Coupled with a CCD camera, capable of auto-nulling to improve clarity and reduce noise, the imaging feature of this instrument allows for a direct view onto the sample’s surface, allowing for qualitatively analysis of surface homogeneity and structure.
Also equipped an automatic motorized x-y-z stage for easy and quick endpoint measurements.
This system has high lateral/spatial resolution (1 micron) and high thickness resolution (better than 0.1 nm).